| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_0f705f295f4ba571f5311e5ef1b57807 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05B3-283
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05B1-0233
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67109
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05B3-143
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05B3-68 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05B3-68
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05B3-28
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05B3-18
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05B3-16
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05B3-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05B1-02 |
| filingDate |
2000-10-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_714d62ce42690127f6a3d4eb7388a833
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_951f3cc6581ad06938cb56332b863299 |
| publicationDate |
2002-01-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-2002025758-A |
| titleOfInvention |
Hot plate unit |
| abstract |
(57) [Problem] To provide a hot plate unit capable of raising and lowering the temperature sufficiently quickly even if the diameter of the substrate becomes large and capable of reducing the size of the apparatus. SOLUTION: The substrate provided with the temperature adjusting means is a hot plate unit attached to a support container, wherein the thickness of the support container is 50 mm or less. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-100339951-C
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2005158270-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7999210-B2 |
| priorityDate |
2000-05-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |