| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_9d527f9a5c3e991a1797de3518a88d14 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R1-06794
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R1-07378 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R1-07342 |
| classificationIPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R1-067 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R1-073
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R1-06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-66
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R31-28
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R31-26 |
| filingDate |
2001-05-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d749f6f2b07d6a4cfb199b9133ba9649
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_78b725c4e0861b0119ea84d2af9f427f |
| publicationDate |
2002-01-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-2002022767-A |
| titleOfInvention |
Plane adjustment mechanism of probe contact system |
| abstract |
(57) [Problem] To provide a probe contact system that adjusts the distance between the tip of a contactor and a contact target by a simple and low-cost mechanism. A planar adjustment mechanism is provided on a contact board having a number of contactors, a probe card for forming an electrical connection between the contactor and a test head of a semiconductor test system, and between the contact board and the probe card. A conductive elastomer, a connection member that connects the contact board and the probe card at three positions on the contact board, and a connecting member that rotates so that the distance between the contact board and the probe card can be adjusted; A gap sensor for measuring a gap between the contact substrate and the target substrate; The rotation adjusting device is configured to rotate the connection member so that the gap between the contact substrate and the target substrate becomes the same at the point position. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2011137801-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20190061647-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2009031192-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-102520852-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-100984769-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-100906344-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101991073-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20200036744-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2008542745-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2010508533-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-102129849-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101025389-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2009527728-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2007538263-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7859280-B2 |
| priorityDate |
2000-05-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |