http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2002018454-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_d97cb748898aa080b013f7f35bc8b434 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C02F1-42 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C01B13-10 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01F1-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C02F1-78 |
| filingDate | 2000-07-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_60024dfc25b8da03a232569a3b3c2298 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6200ab2aff46265b12780b123fbe6c20 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a9b1b5d562df50489b5100e93618f1d5 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f9d34b2e97c8a7601fda49603f3fc378 |
| publicationDate | 2002-01-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2002018454-A |
| titleOfInvention | Ozone dissolved water supply device |
| abstract | (57) [Problem] To supply ozone-dissolved water for a long distance without substantially impairing the purity of ultrapure water in a wet cleaning process of electronic materials or a surface treatment process. Disclosed is a supply device of ozone-dissolved water in which the concentration of dissolved ozone in the air is small and the ozone-dissolved water having a constant concentration can be easily supplied to a point of use. A water supply pipe includes a dissolving device for dissolving ozone in water to be dissolved, a water supply pipe for supplying the water to be dissolved to the dissolution apparatus, and a supply pipe for dissolving ozone from the dissolution apparatus. One or two or more ozone decomposition inhibitors selected from the group consisting of nitrite, nitrite, carbonic acid, carbonate, bicarbonate, sulfurous acid, sulfite, bisulfite and hydrazine A supply device for supplying ozone-dissolved water. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2011127152-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2015142915-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2014140826-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20140032403-A |
| priorityDate | 2000-07-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 47.