http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2002012423-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_51ea8e921747f313703958e64d2aa3a7 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L41-39 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L41-317 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C01G25-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L41-18 |
| filingDate | 2000-06-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_bdcffe0c2aa4a46ca641223db1b3949d http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c72721f1ed01408bf4407d6998bbdaeb |
| publicationDate | 2002-01-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2002012423-A |
| titleOfInvention | Method for producing PZT thin film and PZT structure obtained thereby |
| abstract | [Problem] To provide a mixed alkaline aqueous solution used for hydrothermal synthesis with Ti Provided is a method of manufacturing a PZT thin film, which can supply ions stably and takes a cooling step after the formation of the PZT thin film is completed, and a PZT structure obtained by the method. A substrate having a titanium component on its surface is held in an alkaline aqueous solution of the following (A) or (B), A method for producing a PZT thin film in which a PZT thin film is formed on the substrate surface by hydrothermal synthesis at a temperature of 0 to 250 ° C., wherein at a predetermined production stage, the following alkaline aqueous solution (A) or (B) is (B) a step of additionally supplying an aqueous alkali solution. (A) An alkaline aqueous solution containing a lead compound and a zirconium compound. (B) An alkaline aqueous solution containing a lead compound, a zirconium compound, and a titanium compound. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2010226121-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6963157-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-1331284-A1 |
| priorityDate | 2000-06-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 25.