http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2002012419-A
Outgoing Links
Predicate | Object |
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assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_1af8df51ce24ca931ae718fb747f6aa0 |
classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B32B9-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C01B33-12 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01J20-10 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01J19-00 |
filingDate | 2000-06-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_cbcd12840c339c7df013e139967139c5 |
publicationDate | 2002-01-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber | JP-2002012419-A |
titleOfInvention | Silica mesostructured thin film, mesoporous silica thin film, method for patterning silica mesostructured thin film, and method for patterning mesoporous silica thin film |
abstract | PROBLEM TO BE SOLVED: To provide a highly continuous and uniform patterned silica mesostructured thin film having a uniaxially oriented pore structure at an arbitrary position on a substrate. SOLUTION: A step of forming a pattern of an acid-resistant metal on a substrate surface, a step of further forming a polymer compound thin film on the substrate on which the patterned metal is formed, and rubbing the polymer compound thin film And holding the rubbed substrate in an aqueous solution of an acidic surfactant containing silicon alkoxide to form a thin film of a silica mesostructure on the substrate, and the metal pattern of the substrate A silica mesostructured thin film having a uniaxially oriented pore structure produced by a step of peeling the silica mesostructure formed thereon. |
isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-104402006-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-4497863-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2004091318-A |
priorityDate | 2000-06-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 32.