| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_e757fd4fedc4fe825bb81b1b466a0947 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L28-40
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-94
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L27-06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L27-0805 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L27-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L27-06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-822
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-8249
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-94 |
| filingDate |
2001-04-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f7379fbc946a36fff1b66f49768b7c39
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_71d89604151408f43461db8901c03b0d
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c1059ad2fb1b34f440bdd290b224b71c |
| publicationDate |
2002-01-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-2002009163-A |
| titleOfInvention |
Method of manufacturing laminated double polysilicon / MOS capacitor using SiGe integration mechanism |
| abstract |
(57) Provided is a stacked double polysilicon / MOS capacitor useful as a component of a BiCMOS device including a semiconductor substrate having a first conductivity type region formed on a surface thereof. A gate oxide overlapping a first conductivity type region is formed on a semiconductor substrate. A first polysilicon layer doped with an N-type dopant or a P-type dopant is formed at least on the gate oxide layer. A dielectric layer is formed on the first polysilicon layer. A second polysilicon layer doped with the same or different dopant as the first polysilicon layer is formed on the dielectric layer. |
| priorityDate |
2000-04-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |