http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2002006493-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_03d0f52bb4069f8a19d70dcfb697c67a |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-039 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F212-04 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08L25-18 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08L33-06 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F212-14 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08K5-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F220-18 |
| filingDate | 2000-06-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0d5ffbe3a002beae1e47db20f99af99f http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_464180103f87187b3aab20511a8537b7 |
| publicationDate | 2002-01-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2002006493-A |
| titleOfInvention | Positive photoresist composition |
| abstract | (57) [Problem] To provide a chemically amplified positive photoresist composition in which shortening at an end portion (longitudinal direction) of a line pattern is improved. SOLUTION: A resin (A) having a structural unit containing an acid-decomposable group having a specific structure and decomposing by the action of an acid to increase the solubility in an alkali developing solution, and an acid having another specific structure It contains a resin (B) which has a structural unit containing a decomposable group and which decomposes by the action of an acid to increase the solubility in an alkali developing solution, and a compound which generates an acid upon irradiation with actinic rays or radiation. A positive photoresist composition comprising: |
| priorityDate | 2000-06-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 257.