| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_db0ca12b4b1f98e17edddb9bdcf105b8 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R31-26
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-66
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R1-073
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R1-067 |
| filingDate |
2000-06-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3a87f4e541d9c8ece2e6cf1eb8e5b8d5
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_74d928c39916473e94a4454d7164de92
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_72fab61abd13c3a3fa8b13f62f6b3a82
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5187429ea650e27964f806d9a5341647 |
| publicationDate |
2002-01-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-2002005958-A |
| titleOfInvention |
Measuring needle for probe card, probe card and method for forming measuring needle |
| abstract |
(57) [Problem] To maintain a function such as conductivity of a measuring needle with a simple configuration and without damaging the measuring needle and without reducing the use efficiency of the probe card. It is an object to provide a measuring needle for a probe card, a method for forming a measuring needle, and a probe card using the measuring needle. SOLUTION: A foreign matter adhesion preventing layer 24 made of titanium boride is formed on a surface of a tip portion 22a of a measuring needle main body 22. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2005283359-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2009115720-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2008123638-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8324918-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-4562122-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2009040986-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-5364581-B2 |
| priorityDate |
2000-06-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |