http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2002005629-A

Outgoing Links

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filingDate 2001-05-01-04:00^^<http://www.w3.org/2001/XMLSchema#date>
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publicationDate 2002-01-09-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber JP-2002005629-A
titleOfInvention Optical measuring device
abstract (57) Abstract: In an optical measuring device, a simple and compact configuration of an optical inspection device is used, and an accurate measurement of the properties of a sample to be inspected, particularly a structured wafer and an unstructured wafer, is provided. Configure so that information can be obtained. A light guiding device (23, 25) having a large number (N) of optical fibers (24, 26) for coupling an object light beam (10) and a reference light beam (9) to an evaluation device (11). ) Is provided.
isCitedBy http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101423338-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2008286583-A
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priorityDate 2000-05-02-04:00^^<http://www.w3.org/2001/XMLSchema#date>
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Incoming Links

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Total number of triples: 22.