| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_696ca0ae93d5cf5a686273601361781f |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C02F1-58
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01J27-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01J27-053
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01J31-18
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01J23-22 |
| filingDate |
2000-06-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_196b6d2d0f380bafbe47dd2b988efcbd
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1f658c4b113892f15c4f748f57c81a35
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_80fcb6c040a9abf48c6671f20ddb3f48 |
| publicationDate |
2002-01-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-2002001358-A |
| titleOfInvention |
Hydrogen peroxide decomposition method of chemical polishing waste liquid |
| abstract |
(57) [Problem] To provide a method for decomposing hydrogen peroxide excellent in operability and environment for a chemical polishing liquid containing hydrogen peroxide. SOLUTION: A metal vanadium or a vanadium compound is added to a chemical polishing waste liquid containing hydrogen peroxide. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-7219088-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20200083322-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-111377515-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-111377515-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2013095907-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2020104086-A |
| priorityDate |
2000-06-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |