http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2001518710-A
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67769 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67781 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67742 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67259 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B65G37-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B65G1-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B65G49-07 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-677 |
| filingDate | 1998-01-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2001-10-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2001518710-A |
| titleOfInvention | Semiconductor processing apparatus having a linear conveyor system |
| abstract | (57) Abstract A transport system for manipulating semiconductor wafers in a processing tool (10) is described. The system includes a transport unit guide (66) disposed within the processing tool (10) to support the wafer transport unit (61) as the wafer transport unit moves between the first and second positions. Contains. The transport unit guide (66) includes a frame (65), a horizontal guide rail (63) installed on the frame (65), and the transport unit guide (66) near the horizontal guide rail (63). It has a series of deployed magnetic segments (71, 74). The wafer transfer unit (62) includes a tram (84) translatably mounted on the lateral guide rail (63) and a wafer transfer arm assembly (86) for manipulating the semiconductor wafer. An electromagnet is mounted on the tram to cooperate with the magnetic segments (71, 74) to move the transfer unit (62) along the guide rail (63). An actuator is used to control the position of the transfer unit (62) and the transfer arm assembly (86), and a sensor is used to determine the position of the transfer unit (62) and the transfer arm assembly (86). (91) is used. A controller (101) is located remotely from the wafer transfer unit (62) and uses the actuator to control the movement of the transfer unit (62) and the transfer arm assembly (86) in response to the sensor (91). Lead. A communication link has been established between the actuator, the sensors, and the controller. Preferably, the communication link is an optical fiber link. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2011103463-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2013168441-A |
| priorityDate | 1997-09-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 24.