http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2001517267-A
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S261-65 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-4481 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-45561 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10N60-0464 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-18 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-409 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-40 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-4483 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-408 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-18 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L39-24 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-40 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-448 |
| filingDate | 1996-06-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2001-10-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2001517267-A |
| titleOfInvention | Supply device for raw material reagent liquid, and chemical vapor deposition device provided with the supply device |
| abstract | (57) Abstract: A method and apparatus for supplying a non-volatile reagent in a gaseous state, wherein the non-volatile reagent raw material liquid is flash-evaporated at a high temperature on an evaporation matrix structure (26). A carrier gas flows through the flash evaporation matrix structure to generate a carrier gas mixture containing the flash evaporated source reagent. The evaporation matrix structure (26) preferably has a large surface-to-volume ratio and suitably includes a porous matrix member such as a screen mesh through which the reagent raw material liquid is distributed for flash evaporation. The present invention is particularly useful in providing Group II reagents and compounds, and complexes of early transition metals, such as, for example, zirconium and hafnium. The present invention also provides an internal layer of a Group II metal fluoride between a Group II β-ketonate raw material layer, such as YBaCuO, BiSrCaCuO and TlBaCuO type, a superconductor, and an overcoat of gallium arsenide. and, also, for example BaTiO 3, Ba x Sr 1- x Nb 2 O 6, PbZr 1-x Ti x O 3 thin film optical and ferromagnetic materials such as may be used to deposit. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10465286-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10895010-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2010535941-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9469898-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2014111842-A |
| priorityDate | 1995-06-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 52.