| abstract |
The probe (20) includes a top surface (26), a bottom surface (34), a first side wall (36) between the top surface (26) and the bottom surface (34), and the top surface (26). And an extension (22) having a second side wall (38) between the second side wall (38) and the bottom surface (34). The end (40) is a bottom surface extending to the sharp end (34), an isotropically etched portion of the first side wall (36) extending to the sharp end (34), and a second side wall (38) extending to the sharp end (34). Isotropically etched portion. The extension has a width of less than about 700 μm and a thickness of less than 200 μm. The distraction includes a fluid channel. Further, the extension part can be formed of silicon not doped with boron. |