| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_20d3042eb4ea7c9afd525aa89373349d |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-42
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C11D7-36
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C11D7-34
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C11D7-32
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C11D7-60
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C11D7-28 |
| filingDate |
2000-06-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2a550543182f4253ef41f75aa6dfdd82
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a1e0daac2801b7b5704e6e670fbbbdd4
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_cd1de7afcbdb77aa35e0feb6539f2e5b |
| publicationDate |
2001-12-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-2001356495-A |
| titleOfInvention |
Composition for resist stripping solution |
| abstract |
(57) Abstract: A composition for a resist stripping solution comprising, as an essential component, at least one selected from the group consisting of a phosphoric ester having a perfluoroalkyl group and an amine salt and an ammonium salt thereof. [Effect] By containing a characteristic compound having a perfluoroalkyl group and a phosphoric ester group in the same molecule, it is excellent for various metal wiring materials without deteriorating resist stripping performance in a semiconductor element and liquid crystal element manufacturing process. In addition, it is possible to exhibit an anticorrosion effect. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101341754-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7879784-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2006072083-A |
| priorityDate |
2000-06-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |