http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2001334125-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_1e8ba6870e42607109689c74072ca5d3 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01J20-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01D53-34 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01D53-54 |
| filingDate | 2000-05-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_44650558c287f974d8c8bfc6ca08c959 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_63380385f24fe44e496da01ef0701087 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_61632c06926cfe0e64e9b46b50da86d9 |
| publicationDate | 2001-12-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2001334125-A |
| titleOfInvention | Nitrogen fluoride purification system and purification method |
| abstract | (57) [Summary] [PROBLEMS] To easily detect breakthrough of a nitrogen fluoride purifying agent, Provided are a nitrogen fluoride purification system and a purification method capable of preventing outflow of nitrogen fluoride to the downstream and capable of efficiently performing purification and detection. SOLUTION: A purifying agent layer for nitrogen fluoride, a reaction layer filled with a metal such as silicon or a metal compound, and a preliminary purifying agent for purifying nitrogen fluoride without completely reacting with a metal fluoride such as silicon A purifying device having three built-in layers and means for heating these three layers, a cooling unit for cooling gas discharged from the purifying device, and a gas discharged from the cooling unit containing metal fluoride. In this case, the purification system includes a detection unit filled with a detection agent that changes color in response to the change. Further, a gas containing nitrogen fluoride is passed through the above-mentioned purification system to purify the gas. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2006158990-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-4553705-B2 |
| priorityDate | 2000-05-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 70.