http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2001329368-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_74973199515dbabd2310245aab03e282 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-24 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C01B33-029 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-507 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-205 |
| filingDate | 2000-05-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_300f683c99202833d1fb9434b7631a9a http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_683f5ccfa82840cbc036458bdd6e4493 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_908d3b759551164fba8faf489289d04b http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_be653073e8940ad9bdfd3c7bfad532bf |
| publicationDate | 2001-11-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2001329368-A |
| titleOfInvention | Silicon film forming method |
| abstract | (57) [Summary] (with correction) [PROBLEMS] To provide a method for manufacturing a silicon film having a uniform film thickness distribution. SOLUTION: An antenna 1 for exciting a helicon wave The H 2 gas 16 is supplied to the glass tube 20 in which the HFC 5 is installed, the SiH 4 gas is supplied between the antenna 15 and the substrate 9, and the antenna 15 for helicon wave excitation is installed in a non-uniform magnetic field. In a cusp magnetic field, and in a method of forming a silicon film by helicon wave plasma CVD, The diameter of the glass tube 20 is set so that the radial distribution of the plasma electron density is double-peaked, and the electron density distribution is changed from peak-shaped to double-peaked. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2006319127-A |
| priorityDate | 2000-05-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 21.