| abstract |
(57) [Summary] [Object] The present invention is based on (1) Amount of processing per unit time required for abrasive grains for slurry processing while using diamond synthesized under static ultrahigh pressure as a raw material. The big of (2) A fine single crystal that simultaneously satisfies the requirements that the surface roughness of the processed surface is small, and (3) if the material to be processed is a soft material, the number of abrasive grains that bite into the processed surface and remain is small. Providing type abrasive particles, and a method of making them, Main purpose. [Structure] 1. Fine diamond abrasive particles which are aggregates of single crystal particles having a D50 average particle diameter of 300 nm or less consisting essentially of diamond, wherein most of the activated carbon atoms on the surface of the particles are terminated with hydrogen. 2. A diamond powder consisting of an aggregate of (primary) particles having an average particle size (D50 value) of 50 nm or more was placed in a hydrogen atmosphere at 700 A method for producing fine diamond abrasive particles, characterized in that the surface of constituent diamond particles is partially non-diamond carbonized by a heat treatment performed at a treatment temperature of not less than 1400 ° C. |