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publicationDate 2001-11-16-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber JP-2001318051-A
titleOfInvention Method for measuring trace OH group concentration in quartz glass
abstract (57) [Summary] [Purpose] To easily determine the concentration of trace OH groups in a quartz glass body, To provide a method for measuring accurately. SOLUTION: O in quartz glass is measured by infrared spectrophotometry. In the H group concentration measurement, a measurement test piece and a blank test piece having two opposing planes were prepared from a quartz glass body for measurement and a quartz glass body for blank having a known OH group content. The infrared light in the range of approximately 2500 nm to approximately 2950 nm is sequentially incident perpendicularly on one of the two opposed planes, and at the same time, the emitted light is detected from the other surface. A spectrum is obtained, an OH group absorption peak at 2720 nm is selected, and from the peak height, the following equation is obtained: C sample = C blank + ΔA / Lε × (M H + M O ) / ρ × 10 3 (where C sample is the OH group concentration (wt · ppm) in the test piece for measurement, and C blank is O in the blank test piece. H group concentration (wt.ppm), ΔA is peak height (AB S. ), L is the optical path length (cm), ε is the extinction coefficient (l · mo) l -1 · cm -1 ), M H is the atomic weight of hydrogen, M O is the atomic weight of oxygen, and ρ is the density (g · cm -3 ) of quartz glass. ), Characterized in that it is calculated by using Method for measuring H group concentration.
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