| abstract |
(57) [Problem] It is an object of the present invention to be excellent in releasing property and cushioning property, and excellent in safety, economy and productivity, and to be able to manufacture a long and thin material. In a composite sheet used in a pressure bonding step which is one of electronic device manufacturing steps, a heat-resistant sheet made of a fluororesin, a silica fine particle layer formed on one surface of the sheet, and The heat-resistant silicone rubber layer 1 formed on the silica fine particle layer 12 3. A composite sheet 14 comprising: |