| abstract |
PROBLEM TO BE SOLVED: To efficiently vaporize an organic monomer at a high temperature having a large saturated vapor pressure and efficiently grow an organic polymer film in a high vacuum by a plasma polymerization reaction of the obtained organic monomer gas. SOLUTION: After mixing a liquid divinylsiloxane bisbenzocyclobutene (DVS-BCB) monomer with a carrier gas, it is sprayed into a reduced-pressure vaporization chamber maintained at a high temperature to form an aerosol composed of liquid fine particles of an organic monomer, BCB monomer (organic monomer) via the aerosol Is instantaneously vaporized to generate a BCB monomer gas (organic monomer gas). As a result, an aerosol having a large specific surface area has a large vaporization area, and vaporization occurs before a polymerization reaction occurs even when heated at a high temperature, so that a BCB monomer gas having a large saturated vapor pressure of 0.1 g / min or more at 200 ° C. This makes it possible to form a plasma-polymerized BCB film at a high speed five times or more that in the related art. |