http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2001307621-A

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classificationIPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J29-04
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filingDate 2000-04-25-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d62675daf345f57e5625e05d93d51cc9
publicationDate 2001-11-02-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber JP-2001307621-A
titleOfInvention Method of manufacturing electron source substrate, electron source substrate manufactured by the method, and image display device using the substrate
abstract (57) Abstract: An electron source substrate is obtained by forming a high-precision and high-quality electron-emitting device. In addition, a high-quality image display device is obtained by using the electron source substrate. SOLUTION: A plurality of pairs of device electrodes are arranged on a substrate, and a solution containing a conductive thin film material is sprayed from a spray head between the device electrodes to form a surface conduction electron-emitting device group. One element of the surface conduction type element group is formed by a dot image as shown in the drawing, in which a plurality of droplets are ejected. A dot image is formed by ejecting droplets while the droplet ejecting head and the substrate relatively move in two directions perpendicular to each other. At this time, the length of the multi-nozzle of the ejection head in the nozzle arrangement direction is set to be equal to or longer than the distance between the element electrodes, so that droplet application between the element electrodes can be performed in one main scan. At the same time, by performing sub-scanning in units of adjacent pitches of the element group, an electron-emitting element can be formed efficiently and with high accuracy.
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