| abstract |
(57) [Problem] To provide a method for manufacturing a piezoelectric element capable of improving the uniformity of piezoelectric characteristics. SOLUTION: The method includes a step of drying an organic metal sol and a step of degrease the sol. In the step of degrease, the whole surface of the substrate 512 is brought into close contact with the hot plate 100 to heat the substrate. More specifically, the small holes 10 A method using a substrate adsorption type hot plate provided with 4, There is a method of applying a load with the weight 101. Alternatively, the substrate 512 may be placed on the hot plate 100 while being pressed against the metal plate 105 so as to be in close contact with the metal plate 105 and correcting the warpage of the substrate 512. Furthermore, the ceramic plate 102 may be placed on the hot plate 100, or the heating wire 103 may be used to heat by radiant heat instead of heat conduction. |