| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_73ebc284a55d5daf0e209d6186c9e65c |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C26-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L41-18
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L41-317
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L41-43
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C01G25-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L41-39 |
| filingDate |
2000-03-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_fb0de79e456d77c2e47e1ca8d99edde5
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_73eaefd5d2ee908c6bef54af0b75d2a3
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_27592472705abfcae72b068b228d6bf5 |
| publicationDate |
2001-10-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-2001279464-A |
| titleOfInvention |
Preparation method of ferroelectric thin film |
| abstract |
(57) Abstract: A ferroelectric thin film having a small crystal grain size on its surface and having columnar crystal grains is prepared for a ferroelectric thin film produced by a solution coating method. SOLUTION: Butoxyethanol is used as a solvent, lead acetate, With respect to a ferroelectric thin film raw material solution containing zirconium acetylacetonate and titanium tetraisopropoxide as raw materials and having a crack inhibitor and a coordination stabilizer added thereto, a drying step and a heat treatment are performed every time one layer of the raw material solution is applied. Is performed, and these steps are repeated to produce a ferroelectric thin film. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2014157822-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2008120644-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-100914449-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2006176385-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2012009800-A |
| priorityDate |
2000-03-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |