| abstract |
[PROBLEMS] To provide a thin-film zinc oxide resonator having higher crystallinity and orientation without affecting its resistivity and a method of manufacturing the same. A method for manufacturing a resonator is disclosed. The method first includes providing a substrate base (50) having a dielectric layer. Thereafter, the adhesive layer (115) A nucleation promoting film (120) formed on the dielectric layer is formed on the adhesive layer. Subsequently, a zinc oxide layer (125) is formed on the nucleation promoting film, and an upper conductive layer (130) is formed on the zinc oxide layer. |