| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_c186e9ae8cafab5df5c8d80cfa7b0fa1 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C30B29-52
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C30B25-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-205 |
| filingDate |
2000-03-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_bf4d19c3f688bb5155ba1085f19eacd0
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_990c6c01e31ddeef638c026446139baf
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f85b1463b49a4064589d7b930f71a835
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_abe78b22dae980e3709e0ab10abc507b
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_06bdc247272bf8871948fa94720009f4
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_62f3e59e161d0d3068a51b563b64715d |
| publicationDate |
2001-10-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-2001274098-A |
| titleOfInvention |
Method for producing FeSi2 |
| abstract |
[PROBLEMS] To provide a method for producing FeSi 2 which can prevent carbon contamination and is excellent in mass productivity. SOLUTION: The method for producing FeSi 2 according to the present invention comprises the steps of: Is characterized in that FeSi 2 30 is vapor-phase epitaxially grown on seed crystal 10 by reacting a halide of Si with a halide or hydride of Si. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2004024626-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-1548148-A4
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-1548148-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2004099392-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2007281411-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8173093-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-4526758-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7972583-B2 |
| priorityDate |
2000-03-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |