http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2001242624-A
Outgoing Links
Predicate | Object |
---|---|
assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_06836496fbb35de4839e8a82a3cd8963 |
classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08L35-06 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08K5-3492 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08K5-1515 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-32 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-038 |
filingDate | 2000-02-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1d84af3086bc8309b2f588cfd22a1a07 |
publicationDate | 2001-09-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber | JP-2001242624-A |
titleOfInvention | Photosensitive resin composition |
abstract | (57) [Summary] [PROBLEMS] To be developed with an alkaline aqueous solution and have high sensitivity, Moreover, a photosensitive resin composition capable of easily forming a patterned thin film having excellent properties such as insulation, flatness, heat resistance, and solvent resistance, and a low dielectric property simultaneously with the above properties. Provided is a photosensitive resin composition capable of easily forming an excellent patterned thin film and a method for treating the same. A negative photosensitive resin composition comprising a copolymer containing at least two components of styrene and maleic amide, a melamine compound, and a photoacid generator. A method for treating a negative photosensitive resin composition, comprising coating, exposing, and alkali developing the negative photosensitive resin composition, and then washing with a high-pressure microjet. |
isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2021117486-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20220094209-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101136358-B1 |
priorityDate | 2000-02-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 307.