http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2001234368-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_80787665b837ed3eb503bbcd27c0043a |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23F1-08 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05K3-06 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23F1-30 |
| filingDate | 2000-02-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2f2a7d27a6474af90d156351fadfd473 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_18ce4d675b325f4c2ec709efb59a785b http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2f78aa5eb34988574fdaf060ee9e2131 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f18024999f803661da9a38a93f3cedea |
| publicationDate | 2001-08-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2001234368-A |
| titleOfInvention | Circuit board manufacturing method, etching method and etching apparatus |
| abstract | (57) Abstract: An object of the present invention is to improve the accuracy of a pattern formed on a circuit board by suppressing a decrease in an etching rate, thereby suppressing a failure due to an unetched residue. It is to provide a manufacturing method of. Another object of the present invention is to provide an etching method and an etching apparatus used for the method. Here, the circuit substrate includes a display substrate such as a plasma display panel or a liquid crystal display device, or a wiring substrate. In order to achieve the above object, the present invention provides a method for manufacturing a circuit board, comprising: a step of forming at least a Cr film on a substrate; and a step of forming a conductor pattern by etching the Cr film. The Cr film is etched using an electrolytically oxidized etchant. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2015042404-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2007119846-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2014525680-A |
| priorityDate | 2000-02-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 54.