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filingDate 2000-02-24-04:00^^<http://www.w3.org/2001/XMLSchema#date>
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publicationDate 2001-08-28-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber JP-2001233604-A
titleOfInvention Coating liquid for forming oxide thin film, method for producing the same, and method for producing oxide thin film
abstract PROBLEM TO BE SOLVED: To provide a coating liquid which is excellent in film-forming property, moisture resistance and long-term stability, can bake a coating film at a low temperature after film formation, and can form an oxide thin film of good film quality. And a method for producing the same. When a metal alkoxide is hydrolyzed to prepare a coating solution containing a metal oxide or a precursor thereof, a molar ratio of the metal alkoxide to the metal alkoxide is 0.1 to 10 in an organic solvent containing an alkoxy alcohol. Hydrolyze the metal alkoxide with a certain amount of water.
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