| abstract |
(57) [Summary] [Purpose] Accurate measurement is always possible, and disassembly and repair Even when a laminated substrate is used as the substrate, the probe card does not reduce the efficiency of the wiring in the middle layer and does not adversely affect the strength of the substrate. A substrate, a spacer mounted on the back side of the substrate, a reinforcing member mounted on a front side of the substrate, and a spacer. 20, a plurality of probes 150 connected to a wiring pattern formed on the substrate 110 and fixed to the probe fixing member 140, and a plurality of probes 150 for attaching the spacer 120 to the substrate 110. 1 mounting screw 160 and at least between the substrate 110 and the reinforcing member 130 and the substrate 110 The space between the spacer and the spacer 120 is not fixed with an adhesive. |