| abstract |
(57) [Summary] (with correction) [PROBLEMS] To prevent internal stress from being generated during the manufacturing process of a sensor. A method of manufacturing a stress relief assembly of a cradle structure and, in particular, an acceleration sensor, an angular velocity sensor, and a micromechanical sensor such as an inclination sensor or an angular acceleration. At least one silicon seismic mass is used as a sensing element. The silicon seismic mass is bonded to a silicon frame via an assembly cradle, and the surface adheres to a coated wafer of glass or silicon. |