http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2001196428-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_0f705f295f4ba571f5311e5ef1b57807 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R31-28 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-683 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R31-26 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R1-06 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-66 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-68 |
| filingDate | 2000-10-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d0665033e79cda0a9c8bb5ac2e2fba21 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_951f3cc6581ad06938cb56332b863299 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_714d62ce42690127f6a3d4eb7388a833 |
| publicationDate | 2001-07-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2001196428-A |
| titleOfInvention | Wafer prober and ceramic substrate used for wafer prober |
| abstract | (57) [Summary] [PROBLEMS] Even when the temperature of a ceramic substrate is increased, heat transfer from the side surface of the ceramic substrate to a support container is suppressed, and the temperature of a chuck top conductor layer on which a silicon wafer is mounted is uniform. Provided is a wafer prober which can be formed and can form a side conductor satisfactorily. SOLUTION: In a wafer prober in which a chuck top conductor layer is formed on the surface of a ceramic substrate, a surface roughness based on JIS R 0601 of a side surface adjacent to the surface on which the chuck top conductor layer is formed is Rmax = A wafer prober having a thickness of 0.2 to 200 μm. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2006147724-A |
| priorityDate | 1999-10-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 48.