http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2001196426-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_0f705f295f4ba571f5311e5ef1b57807 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R31-28 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-66 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R31-26 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R1-06 |
| filingDate | 2000-10-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_951f3cc6581ad06938cb56332b863299 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_714d62ce42690127f6a3d4eb7388a833 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d0665033e79cda0a9c8bb5ac2e2fba21 |
| publicationDate | 2001-07-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2001196426-A |
| titleOfInvention | Wafer prober device and ceramic substrate used in wafer prober device |
| abstract | (57) [Problem] To provide a wafer prober device capable of canceling a stray capacitor interposed in a measurement circuit, generating no noise due to the stray capacitor, and causing no malfunction. SOLUTION: This is a wafer prober including a chuck top conductor layer formed on a surface of a ceramic substrate, and a guard electrode provided on the ceramic substrate, and a wafer prober device including a power supply. , A wafer prober device, wherein a voltage is applied so that the chuck top conductor layer and the guard electrode have substantially the same potential. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-102102974-B1 |
| priorityDate | 1999-10-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 40.