http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2001196413-A

Outgoing Links

Predicate Object
assignee http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_5d7576285d411d00c697e07270d2814a
classificationCPCAdditional http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2224-48669
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2224-04073
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-01007
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2224-05669
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-01006
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-01005
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-00014
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2224-48799
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-01022
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-01019
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-01018
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-01015
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-01014
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2224-48747
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-01013
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2224-48463
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2224-02166
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-01029
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-01028
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-01024
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2224-48847
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-0105
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-01047
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-01068
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L24-45
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2224-48647
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2224-0401
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2224-85375
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-01045
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2224-023
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2224-7865
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2224-16
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2224-48869
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2224-04042
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-01079
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-01078
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-01075
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-01074
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-01073
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-014
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2224-05093
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-01327
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2224-05073
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-05042
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2224-05124
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-04941
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2224-85205
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2224-85203
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-04953
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2224-85201
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-13091
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2224-45124
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2224-05647
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2224-45015
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-181
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2224-48769
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2224-45147
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2224-45144
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-19043
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-19042
classificationCPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L24-05
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L24-03
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L24-48
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L24-85
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-304
classificationIPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L23-485
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L23-52
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3205
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-60
filingDate 2000-01-12-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5ddc6a53ae26ccbc5fd832261787da71
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_81527e1e4b3d04261b707115ac38a9e2
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b0868c46626567f530d780627ae93d8c
publicationDate 2001-07-19-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber JP-2001196413-A
titleOfInvention Semiconductor device, method of manufacturing semiconductor device, CMP apparatus, and CMP method
abstract (57) Abstract: Provided is a semiconductor device which prevents surface oxidation of a pad electrode of a highly integrated semiconductor device and has high connection strength with an external terminal. A semiconductor device includes a pad electrode for connecting to an external electrode, and a multilayer wiring structure connected to the pad electrode, the semiconductor device covering the pad electrode and having an opening on the pad electrode. Then, one surface of the insulating film exposing the surface of the pad electrode is in contact with a metal surface made of one noble metal material selected from a noble metal and a metal containing the noble metal as a main component.
isCitedBy http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2004063996-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2007005536-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2010153707-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2017199706-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2007524996-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9853005-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2006157069-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-100752026-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2003142491-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2008205238-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2008113040-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101035597-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2001298029-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2013089630-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10643967-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2018523312-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2006303452-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-6239214-B1
priorityDate 2000-01-12-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

Incoming Links

Predicate Subject
isDiscussedBy http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID522684
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID313
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID62648
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID452434431
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID962
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID5359268
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID457765275
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419512635
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID418354341
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID944
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419559357
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID23978
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID9032
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419526467
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID451218358
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID784
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419557048
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419491804

Total number of triples: 118.