| abstract |
PROBLEM TO BE SOLVED: To provide an excellent resist dissolution rate, low toxicity, extremely high safety, excellent environmental protection, extremely low unpleasant odor, relatively high boiling point, and good operability. An edge bead remover capable of producing a high-quality substrate for producing electronic parts with high efficiency without generating residues or precipitates. An edge bead remover containing methyl α-hydroxyisobutyrate and glycol monoalkyl ether acetate. |