| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_5547f741b25666fc4ae5195cf71a979b
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_6fc8bbba7dbfdc1fe42f350fc84e17a3 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C18-1216
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01B1-22 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L27-105
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L27-10
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C01G25-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01B1-22
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C18-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-8246 |
| filingDate |
1999-12-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d671b1b5daf24866a5d44875146e1b22
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_76c10c807c454dd2e5db830063ffbcd7
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6162ce65e14134a24249aa85a5a2f761
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7d8d85ef40757123103c51e7712f4695
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_944fa06b898a521cf3ea10a70ce7b55b
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_503902014ab8b04021aa381d46a57eb1
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b1f138cf0bb4b2f24dd13f54f40fa72e |
| publicationDate |
2001-07-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-2001180934-A |
| titleOfInvention |
Solution for forming ferroelectric thin film and method for forming ferroelectric thin film |
| abstract |
[PROBLEMS] To provide a ferroelectric thin film forming solution and a ferroelectric thin film forming method capable of forming a uniform thin film without coating unevenness (striation). A solution for forming a ferroelectric thin film and a method for forming a ferroelectric thin film using the solution, comprising at least one selected from a modified silicone oil and a fluorine-based surfactant. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7741773-B2 |
| priorityDate |
1999-12-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |