| abstract |
(57) [Problem] To provide an ozone generator capable of easily cleaning a discharge tube. SOLUTION: A tank 1, a piping system 11, 12 for supplying a raw material gas into the tank 1 and discharging generated ozone gas, and an ozone gas provided in the tank 1 to cause a discharge phenomenon to act on the raw material gas. Discharge tube 1 that generates 0A, the supply of the raw material gas into the tank 1 through the piping systems 11 and 12 is stopped, the flow of the ozone gas from the tank 1 is stopped, and the argon gas is supplied into the tank 1. Gas purge system 16, 17, 1 for performing argon gas purge by pressing 8 and 19 are provided. |