http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2001176409-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_7c5a4ae81822d214a07bf55ad61bd1cf |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J27-08 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-265 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-08 |
| filingDate | 1999-12-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_facb9cde2b8e7828d22c245b7694544d |
| publicationDate | 2001-06-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2001176409-A |
| titleOfInvention | Ion source |
| abstract | (57) [Summary] [PROBLEMS] To extend the life of a filament while taking advantage of using trimethylindium gas or triethylindium gas as a source gas. This ion source utilizes a source gas containing indium by utilizing thermoelectrons generated from a filament. Is ionized in the plasma generation vessel 2 to extract an ion beam 16 containing indium ions. Moreover, the source gas 28 is a trimethylindium gas or a triethylindium gas. And the filament 8 Consists of tantalum. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2011076736-A |
| priorityDate | 1999-12-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 27.