| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_ef6afd894cd98832773642b0e1b5286e |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C11D7-26
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C11D7-34
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-30 |
| filingDate |
1999-12-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_eac339f2e4aebc945dedf7c2e1c94475
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_53e141430ebf1842c9754c286b01a371 |
| publicationDate |
2001-06-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-2001164292-A |
| titleOfInvention |
Cleaning solution for alkaline developing unit |
| abstract |
(57) [Summary] PROBLEM TO BE SOLVED: To provide a cleaning liquid for an alkali increasing device that has a sufficient cleaning effect, but it has not been provided yet. SOLUTION: A cleaning solution for an alkaline developing device containing an organic carboxylic acid or a salt thereof and an organic acid ester. It preferably further contains an organic sulfonic acid or a salt thereof. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2009249474-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-1296470-C |
| priorityDate |
1999-12-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |