| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_80787665b837ed3eb503bbcd27c0043a |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05K3-26
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05K3-38
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05K3-18 |
| filingDate |
1999-11-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_75600c72d45c35ac5533d1bdc2cd5604
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9f7729fe202a725ef9861afb032682ae |
| publicationDate |
2001-06-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-2001156428-A |
| titleOfInvention |
Etching apparatus and etching method |
| abstract |
(57) Abstract: An object of the present invention is to provide an etching apparatus and an etching method using an alkaline permanganate etching solution having high etching efficiency. An etching bath contains an alkaline permanganate etching solution, and the material to be etched is etched using the alkali permanganate etching solution. Barium chloride is injected into the reaction tank 40 from the additive tank 50 and reacts with carbonate ions to form barium carbonate, which is a hardly soluble salt. Barium carbonate is separated from ionic components by the ultrafiltration device 80 and removed. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20210103022-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2008153640-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/DE-102011111294-B4
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-102360293-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2009178637-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/DE-102011111294-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7695638-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8257604-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2009054774-A |
| priorityDate |
1999-11-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |