| abstract |
PROBLEM TO BE SOLVED: To provide a probe card capable of suppressing adhesion of a melt to a probe needle and recovering an increase in contact resistance due to oxidation of the melt deposit. SOLUTION: A plurality of probe needles to be brought into contact with one electrode pad of a probe card, the plurality of probe needles are connected in parallel to have the same potential, and the current flowing through the probe needle is less than half. In addition, heat generation due to Joule heat is reduced, and melting of aluminum which is a constituent material of the electrode pad is prevented. |