http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2001152336-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_1c3026bd5177f1c397fc6c388925ddf3 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02B1-10 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-50 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02B1-115 |
| filingDate | 1999-11-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3ec3a3d36f712ebb348d449cf10b1eb5 |
| publicationDate | 2001-06-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2001152336-A |
| titleOfInvention | Optical thin film manufacturing apparatus and optical thin film manufacturing method |
| abstract | [PROBLEMS] To provide an optical thin film manufacturing apparatus and an optical thin film manufacturing method capable of forming an optical thin film having a uniform film thickness distribution according to various deposition conditions. SOLUTION: A lens holder (H) and a support holder (P) for holding a lens (L1) so as to be able to rotate, and an evaporation source (E1) for evaporating an evaporation material (S1) for forming a thin film toward the surface of the lens (L1). S) Was provided. The vapor deposition source (S) and the support holder so that the vaporized material (S1) evaporated from the vapor deposition source (S) reaches the surface of the lens (L1) at a larger incident angle as the vapor density distribution increases. A lens-side drive mechanism (ML) and a vapor-deposition-source-side drive mechanism (MS) for changing the relative position to (P) in at least one of a horizontal direction, a vertical direction, and an inclined direction are provided. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2016501314-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8366832-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8168483-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9209427-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8110509-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8609476-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6966952-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9551063-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8377764-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7943443-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2007224354-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8206507-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2009114549-A |
| priorityDate | 1999-11-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
| Predicate | Subject |
|---|---|
| isDiscussedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID451572542 http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID5360311 |
Total number of triples: 27.