http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2001148416-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_0f705f295f4ba571f5311e5ef1b57807 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05B3-20 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C04B35-581 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-324 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-683 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05B3-10 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-68 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-66 |
| filingDate | 1999-12-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_714d62ce42690127f6a3d4eb7388a833 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_951f3cc6581ad06938cb56332b863299 |
| publicationDate | 2001-05-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2001148416-A |
| titleOfInvention | Ceramic substrate for semiconductor manufacturing and inspection equipment |
| abstract | (57) [Summary] [PROBLEMS] In addition to being excellent in the concealing property of an electrode pattern and the temperature measurement accuracy by a thermoviewer, it is also excellent in volume resistivity and thermal conductivity at a high temperature, and has low brightness, and has a hot plate, an electrostatic chuck, To provide a ceramic substrate for a semiconductor manufacturing / inspection apparatus suitable as a substrate for a wafer prober, a susceptor, and the like. SOLUTION: A ceramic substrate containing both carbon whose peak cannot be detected or is below the detection limit on an X-ray diffraction chart and carbon whose peak can be detected is provided on a ceramic substrate. A ceramic substrate for a semiconductor manufacturing / inspection device, comprising a conductor. |
| priorityDate | 1999-09-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 39.