| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_5547f741b25666fc4ae5195cf71a979b |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-32134
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y02P10-20 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23F1-30
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C22B11-046 |
| classificationIPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3213 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C22B3-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C22B11-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C22B7-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09K15-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23F1-30
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-308
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-306 |
| filingDate |
1999-11-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_cfb619fdfc315ff94fc098d011a2bde4 |
| publicationDate |
2001-05-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-2001144083-A |
| titleOfInvention |
Platinum group impurity recovery liquid and its recovery method |
| abstract |
PROBLEM TO BE SOLVED: To provide a platinum-group recovery liquid and a recovery method thereof, which can easily, safely, and recover a platinum-group metal contaminant on a semiconductor substrate surface and a film on the substrate with high recovery rate and high accuracy. I do. SOLUTION: HCl: 10 to 25% by weight, H 2 O 2 : A mixed aqueous solution containing 2 to 5% by weight and HF: 0.01 to 2% by weight or H 2 SO 4 : 65 to 82% by weight, H A mixed aqueous solution containing 4 to 16% by weight of 2 O 2 and 0.01 to 2% by weight of HF is used as a platinum group impurity recovery liquid, and this recovery liquid is dropped on the surface of a silicon substrate or a film on a substrate. The entire surface is scanned, and platinum group impurities are dissolved in the recovery liquid and recovered. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2008042014-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7784998-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2004533712-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2016100577-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9658203-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2006255696-A |
| priorityDate |
1999-11-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |