| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_6b822ee046eb6c45d1e3bd9ce9c1782e |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-786
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-268
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01S3-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-336
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-20 |
| filingDate |
2000-08-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7dec4d1ff9bbf4d655bc09a747cbae06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7ee163e4f194aec3ae8a4c5212afc4ad
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8d1d89c208fb2fe90cf9e5d70bf49684
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_071b4bd4fe3b2c90c0b6c27183f01bb6 |
| publicationDate |
2001-05-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-2001144015-A |
| titleOfInvention |
Laser apparatus and laser annealing method |
| abstract |
(57) [Problem] To provide a laser annealing method for obtaining a crystalline semiconductor film having a large crystal grain size. SOLUTION: When crystallizing an amorphous semiconductor film by irradiating a laser beam, the laser beam is applied to the front and back surfaces of the amorphous semiconductor film. In addition, the ratio (I 0 ′ / I 0 ) of the effective energy intensity (I 0 ) of the laser light applied to the front surface and the effective energy intensity (I 0 ′) of the laser light applied to the back surface at that time is 0. <I 0 '/ I 0 <1 or 1 <I It is characterized in that a relationship of 0 ′ / I 0 is established. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20190066650-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9892919-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-102516486-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-WO2014065018-A1 |
| priorityDate |
1999-08-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |