http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2001127124-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_0f705f295f4ba571f5311e5ef1b57807 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-68 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R31-28 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R31-26 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05K7-20 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R1-06 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-683 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-66 |
| filingDate | 2000-08-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_951f3cc6581ad06938cb56332b863299 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_714d62ce42690127f6a3d4eb7388a833 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d0665033e79cda0a9c8bb5ac2e2fba21 |
| publicationDate | 2001-05-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2001127124-A |
| titleOfInvention | Wafer prober and ceramic substrate used for wafer prober |
| abstract | (57) [Summary] [Problem] To be lightweight, have excellent temperature rising and falling characteristics, do not warp even when a probe card is pressed, prevent breakage of a silicon wafer and measurement errors, and serve as a temperature control means. An object of the present invention is to provide a ceramic substrate used for a wafer prober capable of preventing noise and stray capacitors caused by the noise. SOLUTION: A chuck top conductor layer is formed on a surface of a ceramic substrate, and inside the ceramic substrate, A ceramic substrate used for a wafer prober, wherein a guard electrode and / or a ground electrode is formed. |
| priorityDate | 1999-08-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 45.