http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2001127123-A

Outgoing Links

Predicate Object
assignee http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_0f705f295f4ba571f5311e5ef1b57807
classificationIPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R1-06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-68
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-66
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-683
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R31-28
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C04B41-88
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R31-26
filingDate 2000-08-18-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_714d62ce42690127f6a3d4eb7388a833
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_951f3cc6581ad06938cb56332b863299
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d0665033e79cda0a9c8bb5ac2e2fba21
publicationDate 2001-05-11-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber JP-2001127123-A
titleOfInvention Wafer prober and ceramic substrate used for wafer prober
abstract PROBLEM TO BE SOLVED: To provide a ceramic substrate having a chuck top conductor layer which can be thinned, can reduce a resistance value, and has excellent adhesion to a ceramic substrate. To do. SOLUTION: A ceramic substrate used for a wafer prober, wherein a conductor layer including a plurality of metal layers is formed.
priorityDate 1999-08-19-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

Incoming Links

Predicate Subject
isDiscussedBy http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID17100
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID24586
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID159434
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID447663003
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID20548
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID159433
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID23932
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID449773817
http://rdf.ncbi.nlm.nih.gov/pubchem/taxonomy/TAXID181464
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419582283
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID7358
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419519470
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419559477
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID453010884
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID454511054
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419549332
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID24385
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID23675242
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID935
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419405613
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID158789844
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID450542361
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID452908191
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419512363
http://rdf.ncbi.nlm.nih.gov/pubchem/anatomy/ANATOMYID181464
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID23963
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID443162
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419582280
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID450570635
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID421182920
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID9357
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419579069
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID412550040
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID442501
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID71435129

Total number of triples: 53.