http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2001127059-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_be055db3c1a09879df07379ba969e223 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-318 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-786 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-316 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-336 |
| filingDate | 1999-10-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0220a6378a47e3966516371e685c904f http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c410cd2ef6414af5659b8e1ca9bb1673 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_981c33fbaac762da68edc1aa206489e9 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f958a0ce9a2b6147266e3d5b2b65dc3f |
| publicationDate | 2001-05-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2001127059-A |
| titleOfInvention | Method and apparatus for manufacturing insulator thin film and semiconductor device |
| abstract | The present invention relates to a semiconductor thin film device in the semiconductor industry and a method for manufacturing the same, and more particularly, to a thin film transistor (TFT) used for an active matrix type liquid crystal display and the like and a method for manufacturing the same. A method and a method for manufacturing an insulator thin film that can be used as a gate insulating layer of a TFT. According to the present invention, a catalyst is provided at a position where at least a part is shielded between a plasma generation part and a substrate. As a result, an insulating thin film having less damage to the underlayer and excellent insulating properties can be obtained at a low temperature of 600 ° C. or less due to the effects of the decomposition of the source gas by plasma and the thermal decomposition by the catalyst. |
| priorityDate | 1999-10-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 22.