| abstract |
(57) [Summary] [PROBLEMS] To make uniform the temperature of an object to be heated such as a silicon wafer, to prevent breakage of the silicon wafer, and to prevent an unexpected temperature change from occurring. To provide a ceramic heater capable of recovering to a set temperature in a short time. SOLUTION: A heating element is formed on a surface or inside of a ceramic substrate, a temperature measuring means for measuring a temperature of the ceramic substrate or an object to be heated, a control section for supplying electric power to the heating element, and a measuring section. A storage unit that stores temperature data measured by a temperature unit, and a calculation unit that calculates power required for the heating element from the temperature data, The ceramic heater, wherein the heating element is divided into at least two or more circuits, and different electric power is supplied to each circuit. |