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filingDate 2000-08-04-04:00^^<http://www.w3.org/2001/XMLSchema#date>
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publicationDate 2001-04-13-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber JP-2001102382-A
titleOfInvention Graded composition diffusion barrier for chip interconnect applications
abstract (57) [Problem] To provide a barrier film for a semiconductor device structure. A barrier film includes a compound containing nitrogen and at least one of titanium and tantalum, nitrogen having a variable concentration in the barrier film, and oxygen having a variable concentration in the barrier film.
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priorityDate 1999-08-18-04:00^^<http://www.w3.org/2001/XMLSchema#date>
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