| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_c16d2144a81bfa32a665dca1e93c3d37 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-205
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-768
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-285
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-28
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L23-52
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3205 |
| filingDate |
2000-08-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0a92ca0c927ce7d2c6d2e6da89f2ad76
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1bc86cf74e6771fc3d1701893d0e5b35
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1f4126fb4c9f6f0f27ccccf68c23d8e5 |
| publicationDate |
2001-04-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-2001102327-A |
| titleOfInvention |
Ohmic layer formation method by plasma enhanced chemical vapor deposition |
| abstract |
PROBLEM TO BE SOLVED: To provide a method for forming an ohmic layer by plasma enhanced chemical vapor deposition (PCVD), which can improve the resistivity characteristics and the problem of damage to the surface of a semiconductor substrate when forming titanium silicide as an ohmic layer. I will provide a. SOLUTION: A first step of inserting a semiconductor substrate into a plasma chamber of a chemical vapor deposition apparatus and injecting hydrogen and argon gas, a second step of injecting a source gas containing Ti into the plasma chamber, and A step of forming an RF plasma to deposit a titanium film by a PCVD method. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2010056567-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2008103370-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2009141227-A |
| priorityDate |
1999-08-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |